Topics
Introduction and Historical Perspective
Modern CMOS Technology
Crystal Growth Fabrication and Basic Properties of Silicon Wafers
Thermal Oxidation and Si/SiO2 Interface
Dopant Diffusion
Silicon Manufacturing - Clean Rooms, Wafer Cleaning and Gettering
Midterm Exam TBD
Ion Implantation
Lithography
Thin Film Deposition
Etching
Back-End Technology
Students' presentations
Final Exam