ELEE 6466

Syllabus for Fall 2016

 

Topics

Introduction and Historical Perspective

Modern CMOS Technology

Crystal Growth Fabrication and Basic Properties of Silicon Wafers

Thermal Oxidation and Si/SiO2 Interface

Dopant Diffusion

Silicon Manufacturing - Clean Rooms, Wafer Cleaning and Gettering

Midterm Exam TBD

Ion Implantation

Lithography

Thin Film Deposition

Etching

Back-End Technology

Students' presentations

Final Exam