SILVACO
SILVACO Virtual Wafer Fab allows for simulation of the whole fabrication process of Si devices (ATHENA) and analyses of their operation (ATLAS). The exercise of this lab will focus on examples that are included for the instructional purpose and will be followed by a simple assignment to observe the influence of process conditions on fabricated structures and helpfull notes on SILVACO (http://www.silvaco.com) Athena (Fabrication Processes) and Atlas (Device Operation)
Simulation Assignments (I, II, III, IV, V, VI)
Return to ECE 7366 General or Home
