ECE 7366

Advanced Process Integration

for VLSI

 

Spring 2017

M&W 8:30-10 am, Room: W205

Instructor

Dr. Wanda Wosik

Office: D3 &endash;W316, Phone: 34427, Email: wwosik@uh.edu

Office Hours:TBD or by an appointment

 

Tools

Textbook by B. El-Kareh, "Slicon Devices and Process Intergation, Deep Submicron and Nono-Scale Technologies"

Books by S. Wolf "Silicon Processing for the VLSI Era", vol. II - "Process Integration", 1990 and vol. IV - Deep-submicron Process Technology" 2002 will be also used as reference.

Class notes are available on the ECE 7366 web site notes.

Complementary books: "Atlas of IC Technologies: An Introduction to VLSI Processes", W. Maly; "VLSI Fabrication Principles"; S. K. Ghandi, "VLSI Technology", S. M. Sze; "Solid State Electronic Devices" B. G. Streetman, "Silicon Processiing for VLSI Era, Vol. 4 Deep Submicron Process Technology", S. Wolf and "Silicon VLSI Technology, Fundamentals, Practice and Modeling", J. Plummer, M. D. Deal, and P. B. Griffin

Prerequisite

ECE 6466 or an equivalent course (consent of an instructor)

Corequisite

NONE

Assignments

Several short computer simulations SILVACO will be conducted during the semester.

Project and Presentation

A research paper and a presentation in class will be required on a selected topic at the end of the semester.

Exams

A midterm exam will be given in the middle of the semester and the final exam at the end. These will be open book exams.

Grading

One midterm (weight: 1.0 ) and final exam (weight: 1.5), as well as a research paper (weight: 1.3) and presentation (weight: 0.6) will give 70 % of the final grade; the remaining 30 % will be obtained from the Silvaco simuations.

Schedule

Computer Simulations

Silvaco

I
II
III
IV
V
VI

TBD

TBD

TBD

TBD

TBD

TBD

Midterm Exam

TBD

Paper and presentation

TBD

Final Exam

TBD

 

Academic Honesty Policy

Students in this course are expected to follow the Academic Honesty Policy of the University of Houston. Please refer to http://www.uh.edu/dos/publications/handbook.php for more detailed information. It is the responsibilityof each student to know and follow this policy. You must sign the Academic Honesty Statement, as included in this this handout on the last page, detach it, and submit to me. Failing to do so may result in dropping you from the course list.

Religious Holy Days

Students who, becasue of their religious beliefs, cannot attend classes or complete specific assignments on designated dates may request an excused absence. To do this, you must request the excused absence, in writing, by the 15th calendar day of the semester. Please submit this written request to your instructor to allow him/her to make appropriate arrangements. Students who fail to submit a written request will not be given an excused absence due to religious reasons. More information is included in the Student Handbook.

Students with Disabilities

Students with recognized disabilities will be provided reasonable accommodations, appropriate to the course, upon documentation of the disability with a Student Accommodation Form from the Center for Students With Disabilities. To receive these accommodations, you must request the specific accommodations, by submitting them to the instructor in writing, by the 15th calendar day of the semester. Students who fail to submit a written request will not be considered for accommodations. More information is included in the Student Handbook.

Grade Posting

If you like, you may have your grades posted using an alphanumeric code provided by you in writing. The instructor is not allowed to give out grades over the phone or by email.

Withdrawal Policy

The withdrawal dates are listed in the Academic Calendar section of the Class Schedule. The last day to drop w/o record is February 3nd while the last day to drop with W is April 1st. These dates will be followed strictly. If you stop comming to class but you did not follow the procedure of withdrawal you are still considered to be enrolled. Grades of Incomplete (I) will be given only when a small portion of the course has not been completed for a good reason. If the material has been completed, an "I" grade cannot be given.

Expected Course Outcomes

Students will add to their knowledge base in the fundamentals of electrical and computer engineering related to device physics and materials science including new advanced concepts of microelectronics.

Students will develop their basic skills of problem solving and critical thinking by integrating a knowledge of device physics, material science, and silicon technology.

Students will learn about contemporary issues related to engineering of corrent and future Integrated Circuits.

Students will develop their writing skills to effectively communicate technical materials.

Students will learn useful technical skills such as fabrication processes and computer simulations of both electron devices and advanced processing.

  

 

 

Academic Honesty Statement

 

I have read the University of Houston Academic Honesty Policy on pages 11 through 16 of the UH Student Handbook. I agree to abide by the provisions of this policy.

 

Name: (Please print) _________________________________

 

Signature: _________________________________________

 

Date: ______________________________________

 

 

Please detach this page, and submit it to the instructor